How to create vacuum(etching device) analysis

K.M · December 2, 2017, 23:58

Hello everyone

This is my first post.

I am analyzing etching equipment. Although the etching apparatus originally uses plasma, I want to treat the plasma as a thermal fluid and know how much heat acts on the inner wall of the etching apparatus.
I would like to release thermal fluid (gas other than air) from the inlet of the image below into the vacuum domain (air). What should I do? Also, which model should be used? I think this is a multiphase flow of air (close to vacuum) and some kind of gas.

vijaybr1993 · July 25, 2018, 11:38

KOEI MIYATA,

could you please assist me if you found the solution to create vacuum

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July 25, 2018, 11:38		#2
vijaybr1993 New Member asdf;lkj Join Date: Jul 2018 Posts: 6 Rep Power: 8	KOEI MIYATA, could you please assist me if you found the solution to create vacuum