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modelling adsorption and desorption reaction in fluent |
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May 12, 2016, 12:15 |
modelling adsorption and desorption reaction in fluent
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anonymus
Join Date: Apr 2016
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I am trying to model following reaction on silicon surface.
SiH2Cl2+Si=Si(b)+SiH+SiCl SiCl+Si=SiCl2+Si(b) SiH=Si+h2 But I am not getting any deposition rates for silicon. I have put initial coverage for Si = 1. any help please. |
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cvd, fluent |
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