FOR IMMEDIATE RELEASE

FLUENT and PLASMATOR are Bundled to Offer Comprehensive Plasma Discharge Modeling Capabilities

November 1, 2001, Lebanon, New Hampshire. Fluent Inc., world leader in computational fluid dynamics (CFD) software, and Kinema Research & Software, experts in plasma simulation, announce the release of FLUENT-PLASMATOR, a comprehensive plasma discharge modeling software for semiconductor manufacturing. Chemically reacting plasma discharges are an indispensable part of integrated circuit (IC) fabrication technology. By combining the strengths of the FLUENT and PLASMATOR programs, the bundled product provides the tools needed for reliable semiconductor manufacturing simulation. "By partnering with Kinema we can offer the IC fabrication industry detailed insight into their plasma processes, such as plasma-enhanced CVD and plasma etching systems. Both semiconductor equipment manufacturers and chip makers will benefit," explains Eric Grald, manager of Fluent's Materials Processing Industry Team.

Comprehensive Plasma Chemistry One key to reliable plasma simulation is a detailed and accurate description of the finite rate plasma chemistry. PLASMATOR provides a complete chemistry database, including collision cross-sections, attachment, recombination, ionization and dissociation. Extensive reaction sets can include 100 reactions and as many as 50 species.

Flexible Discharge Models PLASMATOR accurately and efficiently models both inductively and capacitively coupled plasma discharges using reaction rates based on a Maxwellian or non-Maxwellian energy distribution and experimentally measured collision cross sections. PLASMATOR has the capability to model multiple sets of inductive coils or electrodes with separate driving frequencies and power.

3-Dimensional Modeling of Neutral Flows To understand the interaction between the plasma discharge and the flow of neutral species in the reactor, PLASMATOR results are used by FLUENT to solve the three-dimensional velocity, pressure, temperature, and species concentrations. The magnitude and distribution of the resulting deposition (or etching) rate are also computed. To keep computational times low, a reduced set of chemical species is used by FLUENT. The reduced chemistry models have been carefully developed to faithfully reproduce the key aspects of the complete plasma chemistry.

"FLUENT-PLASMATOR gives fast turnaround by providing the right tool for each phase of the simulation, and presents reliable results that have been tested against key reference test cases," says Grald.

"FLUENT-PLASMATOR ensures the best accuracy because the plasma chemistry database is constantly being updated as new experimental measurements and ab-initio quantum-chemical computations are made," says Gabriel Font, Senior Scientist, Kinema Research & Software.

Pricing and Availability FLUENT-PLASMATOR is now available from Fluent Inc. FLUENT annual license fees include unlimited technical support and start at $27,000. PLASMATOR is an $8,000 add-on to FLUENT. Visit Fluent's web site (www.fluent.com) for a listing of worldwide offices and distributors.

About Fluent Inc. Fluent Inc. is the world leader in the rapidly growing field of computerized design and simulation software. Its software is used to predict fluid flow, heat and mass transfer, chemical reaction, and related phenomena. Fluent's software products and services help engineers with detailed product development, design optimization, scale-up, and retrofitting. The software significantly reduces engineering cost while improving the final design of products in applications ranging from design of electronic components and systems to automotive engineering, and from combustion system design to process plant troubleshooting.

Fluent's headquarters are located in Lebanon, New Hampshire, USA, with offices throughout the United States. Its European headquarters are located in Sheffield, England with additional offices in France, Germany, Italy, Belgium, and Sweden. Its Asian headquarters are in Tokyo, Japan. Fluent's software is also available around the world through joint ventures, partnerships, and distributors in Australia, Brazil, China, Japan, Korea, Taiwan, the Czech Republic, and most European countries.

About Kinema Research & Software Kinema Research & Software was founded in 1989 by Dr. Lowell Morgan. Kinema develops and markets computer software for modeling and simulation of partially ionized plasmas and also performs contract research in plasma chemistry modeling, atomic and molecular physics and data services. Kinema's corporate headquarters are located in Monument, Colorado, USA. Additional information on Kinema and its products can be obtained on the World Wide Web at http://www.kinema.com

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Graphics Available Graphic images and accompanying captions to support this release can be found on the web at http://www.fluent.com/about/news/pr/index.htm by following the links to this release. Fluent Inc. grants permission for use of these graphics and their captions in conjunction with any or all of this press release.

For more information, contact:

Paul Whalen

Fluent Inc.

10 Cavendish Court

Lebanon, NH 03766

(603) 643-2600 Ext. 666

pww@fluent.com